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 Hine Automation Products

Integrated Systems

Our Integrated Systems are tool automation solutions for many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor.

The Star Systems are automated load locks developed for pilot production and research and development environments. This Single Substrate Vacuum Transfer Systems can configure to automate many process applications. 

The Constellation Systems are Cassette-to-Cassette Vacuum Transfer System systems are the ideal tool automation solution for high volume production environments.  This cluster system can be easily customized to meet any OEMs’ needs. 

 

 

Star Systems

  Single Substrate Vacuum Transfer Systems

 

  

Hine's Star Systems are automated load locks designed to eliminate the need to vent and evacuate the OEMs process chamber prior to every process cycle. Our Star Systems offers various levels of functionality and integration that meets technical and budgetary requirements of most OEM applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.

FEATURES

  • Handles wafer sizes up to 300mm
  • High vacuum compatibility
  • End effector for Semi Standard Wafers
  • CE compliant

OPTIONS

  • Vertical motion – Z lift
  • Vacuum and gas plumbing
  • Integrated transfer control module
  • Custom end effectors
 
 Data sheet Star_Brochure.pdf 
   

Constellation Systems

Cassette-to-Cassette Vacuum Transfer Systems  

As Cassette-To-Cassette Vacuum Transfer Systems, the Constellation Systems integrate the reliability of Hine Vacuum Robotics and the latest system integration technology into a functional design with a small system footprint. The Constellation System can be customized to many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.

FEATURES

  • Hine Robotics:  HA-5.0 Robotic Arm & HA-50V Vacuum Elevator
  • High reliability of > 3 million MCBF
  • Handles wafer sizes up to 200mm
  • Sophisticated automation features including wafer mapping, wafer cross-slot detection
  • Safety interlocks
  • High vacuum compatibility
  • CE/S2 compliant
  • RS-232 / Ethernet control interface

OPTIONS

  • Optical aligner
  • SEMI standard and custom end effectors
  • Dual/Single end effector
  • 25 or 50 wafer cassettes

 

Data sheetConstallation_Brochure.pdf
Video 

  

Robotic Components

We offer Robotic Arms, Aligners and Elevators for vacuum and atmospheric applications. All of Hine Robotic components are compatible with ultra clean environments. 

Our Atmospheric and Vacuum Robotic Arms provide substrate handling solutions for OEMs and can be easily integrated with any process modules or any cluster system front end.  

Our Atmospheric and Vacuum Elevator provide precise substrate indexing capabilities.   

Our Vacuum Aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. They may be integrated into any system with a robotic arm able to execute Delta Picks.

 

 

Our Vacuum and Atmospheric Cassette to Cassette and Vacuum Mini Load Ports provide substrate handling solutions for OEMs and can be easily integrated with any transfer module or cluster system operating in a high vacuum environment.


Atmospheric Robotic Arms

 

Hine atmospheric robots are high-performance substrate handling solutions for semiconductor applications. These SCARA type robots provide reliable and clean transfer mechanism for atmospheric front ends. Hine atmospheric robots transfer a wide variety of substrates including SEMI standard wafers, reticles and masks.

FEATURES

  • High reliability of > 10 million MCBF
  • 3-axis motion control
  • Pay load up to 0.5kg
  • Standard and custom size arm segments
  • Standard and custom end effectors for SEMI standard wafers 
    and custom substrates
  • Compact design including integrated controller
  • RS-232 / Ethernet control interface
  • The best replacement for the Zbot

OPTIONS

  • End effector types: Vacuum chuck, Edge gripper
  • Wafer mapping sensor
  • Single / Dual end effector blades
  • Custom vertical strokes
  • Tracking mounting
  • Custom payloads
 Data sheetAtmospheric robot arms_brochure.pdf
  

Vacuum Robotic Arms


Designed as the central handling robot for the Constellation Systems, Hine Vacuum Robotic Arms can be integrated with any vacuum transfer systems. The HA-3.0 is the perfect fit for budget sensitive projects where no vertical travel is required. When substrate transfer with verified precision and repeatability within high vacuum environments is required, Hine HA-5.0 Vacuum Robotic Arm is the best solution.

FEATURES

  • High reliability of > 3 million MCBF
  • 2-axis or 3-axis motion control
  • Pay load up to 4.5kg
  • Standard and custom size arm segments
  • Standard and custom end effectors (single or dual)
  • Compact design including integrated controller
  • RS-232 / Ethernet control interface
  • CE/S2 compliant
  • HA-5.0V is the best replacement available 
    for the Hine Design 4.5V
  • High vacuum compatible
  • Class 1 cleanroom compatible
 Data sheet
Vacuum Robot Arms_Brochure.pdf
  

Atmospheric Elevators


With brushless DC motor and proven design, Hine Atmospheric Random Access Elevators provide precise substrate indexing capabilities within ultra clean environments. Robust undercarriages and precision guides allow our elevators to be integrated in applications requiring handling of heavy payloads.

FEATURES

  • High reliability of > 3 million MCBF
  • Pay load up to 34kg
  • Compact design including integrated controller
  • RS-232 / Ethernet control interface
  • CE/S2 compliant
  • Class 1 cleanroom compatible
  • Stroke 185mm and 305mm
 Data sheet
atmospheric elevators_brochure.pdf
  

Vacuum Elevators


With stainless steel bellows, brushless DC motor and proven design, Hine Vacuum Random Access Elevators provide precise substrate indexing capabilities within high vacuum environments. Robust undercarriages and precision guides allow our elevators to be integrated in applications requiring handling of heavy payloads.

FEATURES

  • High reliability of > 3 million MCBF
  • Pay load up to 34kg
  • Compact design including integrated controller
  • RS-232 / Ethernet control interface
  • CE/S2 compliant
  • High vacuum compatible
  • Class 1 cleanroom compatible
  • Plug and Play upgrades for the Hine Design 48V and EMS 1248V elevator models
 Data sheet
vacuum elevators_brochure.pdf
  

Vacuum Aligners


Our aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although our Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks. 

FEATURES

  • High reliability of > 3 million MCBF
  • Fiducial alignment and centering alignment - Delta Pick
  • High vacuum compatible
  • RS-232 / Ethernet control interface
  • CE/S2 compliant
  • Available for wafer sizes up to 300mm
  • Class 1 cleanroom compatible
  • Translucent or opaque wafers
 Data sheet
vacuum aligners_brochure.pdf
  

Vacuum Cassette Load Ports


Designed to provide cassette loading and unloading capabilities for the Constellation family of cluster systems our Vacuum & Atmospheric Cassette to Cassette Load Ports (CLP & ALP) can be customized to adapt to a Customer’s specific requirements. The various Load Port configurations are built around the Hine Automation Vacuum & Atmospheric Elevators with material indexing and positional sensing capabilities.

The Vacuum Mini Load Port (MLP) was designed as a single and multi-wafer Load Port to provide loading and unloading capabilities for the Constellation family of cluster systems. The MLP configuration is cost-effective solution for application where a full Cassette is not required and includes a self-centering design for the cassette and wafer eliminating the need for a positional alignment device.

Full system integration requires only limited facilities connections and an Ethernet control interface. With a complete onboard control system our Load Ports function as an intelligent material handling sub system.

FEATURES

  • Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator
  • High reliability of > 3 million MCBF
  • Handles wafer sizes up to 200mm
  • Sophisticated automation features including wafer mapping, wafer cross- slot detection
  • Safety interlocks
  • High vacuum or Atmospheric compatibility
  • RS-232 / Ethernet control interface
  • Slit Valve or Valve door

FEATURES

  • Single Wafer & 4, 25 or 50 wafer Cassettes
  • Cassette cradles
 Data sheet
 vacuum cassette load port_brochure.pdf