STA-10

for high-volume manufacturing of electronic components

The STA-10iL automated plasma system is designed to clean and activate substrates for improved adhesion. It is ideal for semiconductor packaging and electronics manufacturing. The STA-10iL comes standard with in-line conveyance for high-volume manufacturing. An optional drawer can be installed for high-mix, low-volume production.

Atomflo™-INT

for integration of plasma treatment into other manufacturing tools

The Atomflo™-INT plasma system is configured for integration into new or existing process equipment. External rack-mounted controllers support 1 or 2 plasma heads imbedded inside the primary machine. Communication over Ethernet IP provides complete process control and data logging. The INT complies with all US, EU, and SEMI EH&S standards. This integrated plasma system provides the most advanced surface treatment technology inside your equipment.

SPS-100

The SPS-100 is a linear beam plasma source, 100 mm wide, designed to clean and activate substrates for improved adhesion. It is supplied with RF power, gas feed, optical detection, and water cooling from the Atomflo™ 600 controller and CCM. This head is particularly well suited for semiconductor processing.